1) sputter deposition
溅射淀积
2) ion sputtering deposition
离子束溅射淀积
3) dual-ion sputtering deposition
双离子束溅射淀积
4) Sputtering
[英]['spʌtə] [美]['spʌtɚ]
溅射沉积
1.
A systematic methodology has been proposed to investigate the feasibility of the manufacture of ?3" double-sided YBCO thin films by inverted cylindrical sputtering(ICS) with bi-axial substrate rotation.
在溅射沉积方法的真空热传递环境中,溅射气体的热传导比加热器的辐射热传递小3个数量级,可以忽略不计。
5) bulk sputtering
容积溅射
6) reactively pulsed laser sputtering deposition
反应式脉冲激光溅射淀积
1.
The effect of laser energy density,pulsed frequency on the construction and properties of AlN thin films prepared by reactively pulsed laser sputtering deposition was discussed.
就反应式脉冲激光溅射淀积制备氮化铝（ＡｌＮ）薄膜的过程，讨论了激光脉冲能量密度及脉冲频率对所制备薄膜结构性能的影响，并对薄膜的化学稳定性作了比较详细的研究。
补充资料：双低能离子束薄膜淀积设备
双低能离子束薄膜淀积设备
1437
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条