Stimulated by the ever-increasing demands of wide-bandwidth in optical communication and highperformance computing in microprocessor,silicon photonic devices are entering into the integrated and low-cost trend,and series of significant breakthrough both in theory and technology are achieved.

Using the LPCVD method with SiH_4 gas, we have accumulated the half-sphere silicon quantum dots in self-assembled and nano-sized on a silica glass substrate.

Using the low pressure CVD method with SiH 4 gas, we have accumulated the silicon quantum dots in self assembled and nano sized on a silica glass substrate.