The conventional Rutherford elastic scattering model is not suitable to describe the elastic interaction between electron and higher atomic number(Z>4) materials.

The conventional Rutherford elastic scattering formula was based on non-relativistic wave equation of Schrdinger, so it must be corrected to predict the high-energy electron beam lithography.

This work discusses and compares the methods of deriving the Rutherford scattering formula,and analyses the Rutherford scattering in the low energy(e,2e) reactions through the study on electron impact ionization of helium.

Under the circumstances of shielding effect of extranuclear electron, the condition of the classics descriptions of Rutherford scattering formula is derived from the principle of uncertainty relation in the quantum mechanics.

An analysis of the Motion of the Electron in Rutherford Model;

The mixing effect of three different film/substrate systems, Ti/Al, Al/Ti and Ni/Ti, which were irradiated by intense pulsed ion beam, was studied with Rutherford backscattering spectroscopy (RBS).

Analysis of the distribution of Rb in Ion-exchanged KTP Waveguide by RBS

Rutherford backscattering (RBS) spectrum was used to measure the Ti concentration depth profile in H13 steel after Ti ion implantation.

By synchrotron X-ray diffraction (XRD) and Rutherford back scattering(RBS),the microstructure evolution of oxidized Ni/Au contact to p-GaN annealed at different temperature in air are investigated.