1) silicon mirror
单晶硅反射镜
1.
The machining principles and characteristics of electrolytic in-process dressing(ELID)-grinding and magnetorheological finishing(MRF) were analyzed,and new ultra-precision synergistic finishing process inte-grated with ELID-grinding and MRF was applied to nano-precision finishing for silicon mirror.
分析了在线电解修整(ELID)磨削和磁流变光整加工(MRF)的加工原理与特点,充分结合这2种技术的优点对单晶硅反射镜进行纳米级精度的组合加工。
4) SiC mirror
碳化硅反射镜
1.
Fabrication of surface modification aspheric SiC mirror;
表面改性非球面碳化硅反射镜的加工
2.
Experiment of grinding SiC mirror with fixed abrasive
固着磨料加工碳化硅反射镜的实验
3.
Micro theoretical model for grinding SiC mirror with fixed abrasive
固着磨料加工碳化硅反射镜的微观理论模型
5) Silicon carbide mirror
碳化硅反射镜
1.
Research on the effect of optical facesheet deformation during polishing lightweight silicon carbide mirror;
轻质碳化硅反射镜抛光过程镜面变形影响的研究
2.
Measurement and analysis of residual stress in the body of silicon carbide mirror during optical fabrication;
碳化硅反射镜坯体光学加工的残余应力测量与分析
3.
Fabrication and testing of aspheric silicon carbide mirror;
非球面碳化硅反射镜的加工与检测
补充资料：直径6英寸硅单晶及单晶炉
直径6英寸硅单晶及单晶炉
巍 户亡‘砚.士释L朴品及沪晶护万引门l
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条