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1)  Silicon (100)
单晶硅(100)
2)  p-Silicon (100)
p型单晶硅(100)
3)  Si(100)
硅(100)
4)  seed of single crystal silicon
单晶硅籽晶
5)  single-crystal silicon
单晶硅
1.
The micro-tribological and nano-mechanic properties of Ar~+ implanted single-crystal silicon were investigated by using a Micro-tribology Text and a Nano Indenter System, The results show that Ar~+ implantation of single-crystal silicon had increased the wear-resistance, the best dose is 1×10~(16) ions /cm~2.
利用离子注入技术对单晶硅表面进行了氩离子注入,用微摩擦磨损实验机研究了改性层的摩擦磨损行为,并用透射电子显微镜研究了改性层的微观结构。
2.
In Chemical-Mechanical polishing experiments we produced optical quality super smooth surfaces on single-crystal silicon, but cannot insure the surface figure.
使用机械 -化学抛光法加工大尺寸单晶硅可获超光滑表面 ,但很难保证良好的面型。
3.
The nano-scratch behaviors of Ar+ implanted single-crystal silicon were investigated by a nano indenter system, the micro-structure of the implanted layer was analyzed with TEM.
通过离子注入技术对单晶硅表面进行氩离子注入处理,利用纳米压痕仪及其附件研究了单晶硅表面在离子注入前,后的微观力学性能和变形机理,并用透射电子显微镜研究了改性层的微观结构。
6)  single crystal silicon
单晶硅
1.
Study of Parameters of Neutron-Irradiated Single Crystal Silicon;
中子辐照的单晶硅参数研究
2.
Study on Partial Cone Cracks in Nano-grinding of Single Crystal Silicon;
单晶硅纳米磨削过程的摩擦裂纹试验研究
3.
Study on establishing and testing for ultra-precision machining single crystal silicon surface roughness of prediction model
单晶硅超精密切削加工表面粗糙度预测模型的建立及试验研究
补充资料:直径6英寸硅单晶及单晶炉


直径6英寸硅单晶及单晶炉


  巍 户亡‘砚.士释L朴品及沪晶护万引门l
  
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