1) silicon bulk fabrication
体硅加工
1.
Based on development state of various micro power sources at home and abroad and their researching results,the feasibility of micro fuel cells fabricated by MEMS (micro electro mechanical system) silicon bulk fabrication is analyzed in theory.
结合目前国内外各种微电源的发展现状,总结微电源的研究成果,从理论上探讨了利用MEMS体硅加工工艺制作微燃料电池的可行性。
2) bulk silicon micromachining
体硅微加工工艺
3) bulk-silicon MEMS process
体硅MEMS加工工艺
5) micromechanical silicon
微加工硅
6) silicon processing method
硅加工工艺
补充资料：氮化硅纤维增强体(见氮化硅纤维)
氮化硅纤维增强体(见氮化硅纤维)
silicon nitride fibres reinforcements
夔薰黔慧燃泳
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条