1) bulk silicon process
体硅工艺
1.
In this system,the loading structure,frictional pair and force sensors are all integrated on a single chip by the bulk silicon process and bonding technology.
为比较真实地模拟可动微机电器件侧面间的摩擦磨损状况,进而研究MEMS器件的摩擦磨损规律,设计和研制了一种基于单晶硅材料的微摩擦试验模块,利用微机械体硅工艺及键合技术,将摩擦磨损测试单元、加载单元以及微力传感元件集成在单一的芯片上。
2.
In this system,the loading structure,frictional pair and force sensors are all integrated on a single chip using bulk silicon processing and bonding technologies.
利用微机械体硅工艺及键合技术,把系统中的测试机构、加载机构以及力传感器集成在一个单一的芯片上。
3.
The micromirror is fabricated by standard bulk silicon process with the novel isolation technology.
本文提出了一种新型的静电驱动的单轴扭转微镜 ,这种MEMS微镜采用标准体硅工艺和绝缘连接工艺制成。
2) silicon bulk micromachining
体硅工艺
1.
Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining;
基于体硅工艺的定位平台制作工艺分析
2.
Microgripper based on silicon bulk micromachining;
基于体硅工艺的微夹持器设计
3) bulk silicon technology
体硅工艺
1.
The loading structure,testing part and force sensors were all integrated on a single chip by bulk silicon technology and bonding process.
该测试机构利用微机电系统体硅工艺及键合技术,把加载机构、测试机构、摩擦副以及力传感器集成在一个单一的硅片上。
4) bulk silicon micromachining
体硅微加工工艺
5) bulk-silicon MEMS process
体硅MEMS加工工艺
补充资料：氮化硅纤维增强体(见氮化硅纤维)
氮化硅纤维增强体(见氮化硅纤维)
silicon nitride fibres reinforcements
夔薰黔慧燃泳
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条