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1)  RF/microwave components
RF/微波MEMS元件
1.
Both circuits and systems exploiting RF/microwave components are also described on the basis of RF/microwave components.
着重论述了RF/微波MEMS元件及其制造技术、封装要求和设计,并在此基础上阐述RF/微波MEMS元件的应用电路和系统。
2)  RF MEMS devices
RF MEMS器件
3)  RF/MM MEMS device
射频/微波MEMS器件
4)  MEMS Microstructure
MEMS微构件
1.
Research on the Characteristics of the Excitation Device for Testing the Dynamic Characteristics of MEMS Microstructure;
MEMS微构件动态特性测试激励装置特性研究
5)  microwave components
微波元件
1.
Through the comparison among the effect on electric capability of microwave components from material properties,roughness grade,manufacturing and fixing tolerace, the paper describes the importance of them and provides some rational methods to keep the electric and power capability.
通过对微波元件材质、表面粗糙度、加工和安装误差对元件电性能的影响的比较 ,阐述其对保证元件电性能和系统功率容量的重要性并提出合理的解决方法。
6)  RF MEMS Switches
RF MEMS开关
1.
RF MEMS Switches Resonant Frequency Offset by Residual Stresses;
残余应力对RF MEMS开关谐振频率偏移的影响
2.
The reliability and failure mechanisms of RF MEMS switches were one of the most important problems,and it related to the future use of RF MEMS switches,he reliability of RF MEMS switches introduced,the failure modes and mechanisms of series resistive switches and shunt capacitive switches discussed.
本文介绍了RF MEMS开关的可靠性问题,详细探讨了串联电阻式开关和并联电容式开关的失效模式及失效机理,并对今后RF MEMS开关可靠性方面的工作进行了展望。
3.
This paper based on the technology of RF MEMS and focused on RF MEMS switches and phase shifters.
RF MEMS开关方面,理论分析了电容式MEMS开关和接触式MEMS开关的工作状态、电磁特性,并仿真实现。
补充资料:Rf-COOH-Rf-SO3H 
分子式:
CAS号:

性质:又称全氟羧酸-磺酸复合离子膜  Rf-COOH-Rf-SO3H  电解食盐水溶液离子膜电解槽所用的膜材料之一。使用时,将较薄的羧酸层面向阴极,较厚的磺酸层面向阳极,因而兼有羧酸膜和磺酸膜的优点。由于Rf-COOH层的存在,可阻挡氢氧离子返迁移到阳极室,确保了高的电流效率(96%),因Rf-SO3层的电阻低,能在高电流密度下运行,且阴极液可用盐酸中和,产品氯气中氧含量低,氢氧化钠浓度可达33%~35%。可在全氟磺酸膜上涂敷一层全氟羧酸的聚合物,或是将磺酸膜和羧酸膜进行层压,或是采用化学方法处理而制得的复合膜。现以采用化学方法处理者质量最佳。

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