1.
Dynamic Characteristic Testing Technology for Microstructure of MEMS in High Temperature;
高温条件下MEMS微构件动态特性测试技术研究
2.
Research on the Characteristics of the Excitation Device for Testing the Dynamic Characteristics of MEMS Microstructure;
MEMS微构件动态特性测试激励装置特性研究
3.
The Study of Dynamic Characteristic Testing Technology of MEMS Microstructure in High Temperature
高温环境下MEMS微构件动态特性测试技术研究
4.
Dynamic Characteristic Testing Equipment for Microstructure of MEMS Device under High g Force Acceleration;
高g值条件下MEMS微构件动态特性测试装置的研制
5.
The Structure Design and Fabrication of MEMS Micro Heater;
MEMS面型微加热器的结构设计和制作
6.
Study on Measurement Methods of MEMS Micro-Structures In-Plane Motion;
MEMS微结构平面运动测量方法的研究
7.
Fast Measurement Method for the Rotation Angle of MEMS Microstructures
MEMS微结构旋转角度的快速测量方法
8.
Research and Simulation of the Thermal Insulation Property of Porous Silicon Used in MEMS Micro Thermal Sensor;
MEMS微热敏器件中多孔硅绝热性能研究及模拟
9.
MEMS Devices Fabricated by Microfabrication Technology: Research Status and Prospect;
制备MEMS器件的微细加工技术:研究现状与展望
10.
Design of Minisize Integrated Attitude Measurement System Based on MEMS Inertial Sensors
基于MEMS惯性器件的微型船用组合测姿系统设计
11.
Study on Measurement Methods and Key Technologies for Dynamic Characterization of MEMS Microstructures;
MEMS微结构动态测试方法及关键技术研究
12.
Research on Microwave Fractal Reconfigurable MEMS CPW Band-Pass Filter;
微波MEMS共平面分形可重构带通滤波技术研究
13.
Research and Implementation of Reconfigurable Microwave MEMS Low Pass Filter;
微波MEMS可重构低通滤波器的设计与实现
14.
Study of Microstructure and Thermal Islation Property of Porous Silicon Used in MEMS;
应用于MEMS中多孔硅显微结构及绝热性能的研究
15.
Structure and Performance of Air-breathing MEMS Micro-proton-exchange-membrane Fuel Cells
自呼吸式MEMS微燃料电池的结构及其性能
16.
Effects of Vibration on Moisture-Absorption of MEMS Micro-Structures
振动作用对MEMS微结构湿汽吸附的影响(英文)
17.
Study on Laser-MicroPen/MicroJet Direct Writing Technology for Integrated Fabrication of MEMS Micro-Structures
激光—微笔/微喷直写集成制造MEMS微结构关键技术研究
18.
The Implementation and Research on the Key Components of Microwave Receiver Front-end Based on the RF MEMS Technology;
基于RF MEMS技术的微波接收前端关键部件实现研究