1) MEMS comb-drive actuator
MEMS静电梳齿驱动器
1.
Design of MEMS comb-drive actuator for large-displacement and low-voltage;
大位移、低电压驱动MEMS静电梳齿驱动器的设计与研究
2) electrostatic comb-finger actuator
静电梳齿微驱动器
1.
Silicon micromachined gyroscope is mainly driven by electrostatic comb-finger actuator which has advantages of simple structure,low power supply,high sensitivity and not susceptible to temperature.
静电梳齿微驱动器因其结构简单、功耗低、灵敏度高、受温度影响小,成为硅微陀螺仪的主要驱动方式。
3) electrostatically actuated MEMS
MEMS静电驱动
1.
The kinetic characteristic of the parallel plate structure in electrostatically actuated MEMS was analyzed by the state space method.
采用状态空间分析法,研究MEMS静电驱动平行板结构的运动特性,实现了平行板机械子系统和静电子系统状态空间矩阵参数分离,制定了状态反馈控制方案以改善平行板系统的运动特性,在Simulink仿真平台上完成了控制方案的计算机仿真实验。
4) Electrostatic comb actuator
静电梳状驱动器
5) electrostatics comb actuator
静电梳齿致动器
6) comb-drive actuator
梳齿驱动器
1.
Design and fabrication of MEMS comb-drive actuator with large displacement
大位移MEMS静电梳齿驱动器的设计及制作
2.
A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed.
制作了一种低驱动电压、位移达100μm的梳齿驱动器。
补充资料：梳齿
1.梳子的齿。借指发梳。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条