Dynamic Characteristic Testing Equipment for Microstructure of MEMS Device under High g Force Acceleration;

Dynamic Characteristic Testing Technology for Microstructure of MEMS in High Temperature;

When dimension of microstructure reaches micrometer and nanometer scale, its design theory and method are different essentially from traditional mechanical design and method.

Theoretical research on ultrasonic radiation force of micro-components;

A micro-component model, which is the basic unit to construct arbitrary components, is proposed and depicted exactly in the projection on the encoding-action plane of the three-dimension model.

The main function of tensile test in mechanical property testing of micro-sized structure is measurement question of elastic ratio,Poisson s ratio,yield strength anad fracture strength.

The primary uncertain factors in the elastic modulus measurement of microcomponent by microcantilever deflection are analyzed and the fuzzy mathematic method is introduced to the evaluation process.

　This paper describes the relationship of a microcomponent s service performance with its prqpara-　tion technology and the important in theory and in practice to this study is expressed.

The micromachining of three-dimensional metal micropart with complicated shape is the emphasis and hotspot of micromechanical investigation all the times.

Research on the Characteristics of the Excitation Device for Testing the Dynamic Characteristics of MEMS Microstructure;