Considering that the gripping and assembling micro structural parts and systems in complex weapon production depends on the experience of staff,it is necessary to discuss the issue in detail.

According to structural characteristics of microminiatute component, the profile parameters, which can reflect the manufacturing properties, was selected, and a numerical surface profile model including roughness and waviness was built up based on the Patir model, and the case was provided.

In order to improve replication fidelity of microstructured parts,the influence of different processing parameters on the part weight of microstructured parts was studied by taking the micro lens array as the application case and the part weight as the preliminary quantitative index of replication fidelity.