1) sputtering rate
溅射率
1.
Investigation was made of the sputtering rate in glow discharge lamp with re-lation to constituent of 25 different specimens of 6 binary systems, namely, Cr-Fe, Bi-Sb,Cu-Zn, Ag-Cu, Al-Zn and Cd-Sn, by measuring mass loss after each sputtering under con-stant Ar pressure and voltage applied.
在恒定气压和电压条件下,用测量溅射减量的方法,系统研究了Cr—Fe,Bi-Sb,Cu—Zn,Ag—Cu,Al-Zn和Cd—Sn六个系统的25个试样在辉光放电灯中溅射率与组分的关系结果表明;阴极溅射在稳态时,二元合金(不形成金属间化合物)的溅射率与组元浓度的普遍关系是双曲线,只有在某些特殊情况下,两组元的溅射率相差不大时,可以近似看成线性关系。
2.
It shows that different ratios of Ar to O2 have high effects on the sputtering rate and electrical property,while inconspicuous effects on crystallinity and transparency.
研究发现,不同氩氧比对薄膜的溅射率和电学性能影响较大,而对薄膜的晶体结构和透过率没有产生明显的影响。
2) Sputtering power
溅射功率
1.
Effect of sputtering power on structure and properties of copper nitride thin films;
溅射功率对氮化铜薄膜结构及其性能的影响
2.
Effect of sputtering power on properties of ZnO:Zr films deposited on PET substrate
溅射功率对PET衬底上ZnO:Zr薄膜性能的影响
3.
Influence of sputtering power on cyclic performance of Sb thin films as anodes of lithium ion battery
溅射功率对Sb薄膜负极材料循环性能的影响
3) sputtering rate
溅射速率
1.
There are many factors influencing the thin-film NiCr resistor s TCR(temperature coefficient of resistance),such as the vacuum degree during sputtering,sputtering rate,substrate temperature,film thickness and temperature and its holding time in heat-treatment.
影响NiCr薄膜电阻TCR的因素很多,我们分别从溅射淀积工艺和热处理工艺来研究和探讨NiCr薄膜电阻TCR与溅射时的真空度、溅射速率、基片温度、薄膜厚度及热处理温度和时间等因素的关系,从而为提高NiCr薄膜电阻的稳定性和降低其TCR值提供有益的条件。
2.
The total transport model was established and the sputtering rate and compound fraction (θ\-t)of the target were obtained through the analysis of the particle generation, transport and surface reaction The models are expressed by the macro technology parameters and the construction parameters of the chamber,which is of important applied value to sputtering deposited technique of film material
从粒子的产生、输运及表面反应出发 ,建立总的输运模型并得到靶的溅射速率和化合物的复盖度。
4) sputter coefficient
溅射概率
5) sputtering yield
溅射效率
6) Sputtering power density
溅射功率密度
补充资料：电导率(见电阻率)
电导率(见电阻率)
conductivity
d!日nd日O}已电导率(eonduetivity)见电阻率。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条