1) hydrogenated diamond-like carbon(DLC) thin film
氢化类金刚石碳膜
2) H-Diamond like carbon coating
含氢类金刚石膜
3) diamond-like carbon films
类金刚石碳膜
1.
Properties of diamond-like carbon films deposited by unbalanced magnetron sputtering;
非平衡磁控溅射类金刚石碳膜的性能
2.
The deposition of diamond-like carbon films produced by radio frequency glow discharge of hydrocarbon gas was studied,and the effects of radio frequency voltage and deposition time on the thickness and the Vickers microhardness of films were investigated.
研究了碳氢气体通过射频辉光放电沉积类金刚石碳膜。
5) diamond-like carbon(DLC) film
类金刚石碳(DLC)膜
6) diamond-like carbon
类金刚石碳膜
1.
Characteristics and application of diamond-like carbon films by PECVD;
等离子体化学气相沉积类金刚石碳膜的特性及应用
2.
A diamond-like carbon (DLC) film is deposited as an electron injection layer between the polymer light-emitting layer(MEH-PPV) and aluminum (Al) cathode electrode in polymer electroluminescence devices (PLEDs) using a radio frequency plasma deposition system.
用正丁胺作碳源,采用射频辉光等离子系统制备类金刚石碳膜(DLC),沉积在聚合物发光器件中的发光层(MEH-PPV)和铝(Al)阴极间作电子注入层。
3.
In this article we successfully synthesized diamond-like carbon (DLC) films on the stainless steel and glass using CH_4, H_2 as source gases and argon as diluent gas by radio frequency plasma enhanced chemical vapor deposition (rf PECVD) process.
本论文探讨了利用射频等离子体增强化学气相沉积(rf PECVD)技术以CH_4、H_2为气源，Ar为稀释气体，在不锈钢、玻璃等基底上制备大面积类金刚石碳膜(Diamond-like Carbon，简称DLC)。
补充资料：类金刚石膜
分子式：
CAS号：
性质：又称山膜。碳的一种亚稳态，组成主要是碳，也含有氢，其量随工艺条件而异，最多时可达20％。类金刚石具有很高的硬度、高导热性、高绝缘性、良好的化学稳定性、从红外到紫外的高光学透过率等。这与金刚石相似，但其性能数值均低于金刚石膜。类金刚石膜已开始用作耐磨涂层。
CAS号：
性质：又称山膜。碳的一种亚稳态，组成主要是碳，也含有氢，其量随工艺条件而异，最多时可达20％。类金刚石具有很高的硬度、高导热性、高绝缘性、良好的化学稳定性、从红外到紫外的高光学透过率等。这与金刚石相似，但其性能数值均低于金刚石膜。类金刚石膜已开始用作耐磨涂层。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条