1) Diamond-like carbon
类金刚石膜
1.
Study of nanotribology of ultrathin diamond-like carbon (DLC) based on lateral force microscope (LFM);
基于LFM的类金刚石膜纳米摩擦现象研究
2.
Diamond-like carbon(DLC) films were grown on copper substrate coated with an intermediate layer by magneto-sputtering physical vapor deposition(MS-PVD) and by microwave electron cyclotron resonance(MW-ECR) plasma enhanced chemical vapor deposition(PECVD).
将磁控溅射物理气相沉积(MS-PVD)和电子回旋共振-微波等离子体增强化学气相沉积(ECR-PECVD)技术相结合,在铜基体上通过制备两种不同的过渡层,成功地沉积了类金刚石膜。
3.
In this article we successfully synthesized diamond-like carbon (DLC) films on the stainless steel, glass and silicon substrates using C4H10(or CH4) and argon as source gases by radio frequency plasma enhanced chemical vapor deposition (rf PECVD) process.
在电容耦合的射频PECVD系统中,等离子体鞘层作用的结果会在阴极板上产生自偏压,有利于碳离子沉积形成类金刚石膜;借助所设计的中间过渡层Ti/TiN/TiC,在不锈钢上成功沉积了一定厚度的DLC膜,膜与基底的结合力较好;通过优化工艺参数,可以成功地在玻璃、硅片等基底上沉积DLC膜,扩大用射频PECVD工艺沉积类金刚石膜的适用范围。
2) diamond-like carbon film
类金刚石膜
1.
Simulations of the structure characteristic of diamond-like carbon films formed by ion-beam-assisted deposition;
离子束辅助沉积对类金刚石膜结构影响的计算机模拟
2.
This paper has discussed preparing Diamond-like Carbon films by means of micro-wave ECR plasma source ion implantation and plasma enhanced chemical vapour deposition .
本文探讨了利用微波ECR全方位离子注入技术和等离子增强化学气相沉积技术来制备类金刚石膜。
3) diamond-like carbon films
类金刚石膜
1.
Effect of the laser power density on the properties and structures of the diamond-like carbon films deposited by pulsedlaser ablation of graphite;
激光功率密度对类金刚石膜结构性能的影响
2.
The synthesis theory, deposition methods, development and prospect of diamond-like carbon films (DLC) are introduced.
介绍了类金刚石膜DLC的形成原理、制备方法和发展现状,总结了DLC在机械、电子、声学、光学和医学等领域的应用状况以及存在的问题。
3.
for producing diamond-like carbon films in recent years were reviewed.
概述了近年来制备类金刚石膜的新方法如双射频辉光放电 (RF-RF)法、射频-直流辉光放电 (RF-DC)法和微波-射频 (MW-RF)法等;并且对影响类金刚石膜制备及性能的因素如基体材料、制备类金刚石膜时在膜中添加元素、类金刚石膜与基材之间的中间层等进行了较全面的分析。
4) DLC
类金刚石膜
1.
Basically they were a composite of the conventional hard coatings TiN and TiC, and the top layer is a diamond like carbon(DLC) deposited via radio frequency plasma enhanced chemical vapor deposition(RFPECVD).
结果表明,所制备的薄膜为类金刚石膜,薄膜表面含有大量的类石墨的sp2,能有效的担负固体润滑膜的功能。
2.
Smooth, densie and uniform nano\|crystalline diamond\|like\|carbon (DLC) film is deposited on an optical glass substrate by pulsed high energy density plasma(PHEDP) gun charging in nitrogen atmosphore.
利用脉冲高能量密度等离子体法在光学玻璃衬底上、在室温下成功的制备了光滑、致密、均匀的纳米类金刚石膜 。
3.
Diamond like carbon films(DLC films) were deposited on Si substrates from the mixture of C2H2 and Ar by r.
对在不同极板负偏压下采用射频-直流等离子体方法制备得到的类金刚石膜(a-C:H)的微结构进行了测量,利用慢正电子束实验装置,探测并分析了样品缺陷浓度的分布情况。
5) DLC films
类金刚石膜
1.
Some difficulties of vacuum graphite cathodic arc deposition have been overcome and DLC films have been successfully fabricated by means of VCAD method.
克服了真空石墨电弧沉积过程中的一些难点,成功地利用真空阴极电弧沉积法制备了类金刚石膜,并对其表面形貌、硬度及结合强度、结构进行了分析,结果表明,真空阴极电弧沉积法是制备综合性能良好的光亮类金刚石膜的有效方法。
2.
There are mainly two methods of preparing DLC films: physical vapor deposition and chemical vapor deposition.
本课题首先使用等离子体增强化学气相沉积设备在不同参数下制备类金刚石膜,其次用原子力显微镜对所制备试样的表面粗糙度、摩擦力和摩擦系数进行表征,最后用纳米压痕仪测量薄膜的硬度和杨氏模量。
6) diamond-like carbon films
类金刚石碳膜
1.
Properties of diamond-like carbon films deposited by unbalanced magnetron sputtering;
非平衡磁控溅射类金刚石碳膜的性能
2.
The deposition of diamond-like carbon films produced by radio frequency glow discharge of hydrocarbon gas was studied,and the effects of radio frequency voltage and deposition time on the thickness and the Vickers microhardness of films were investigated.
研究了碳氢气体通过射频辉光放电沉积类金刚石碳膜。
补充资料：类金刚石膜
分子式：
CAS号：
性质：又称山膜。碳的一种亚稳态，组成主要是碳，也含有氢，其量随工艺条件而异，最多时可达20％。类金刚石具有很高的硬度、高导热性、高绝缘性、良好的化学稳定性、从红外到紫外的高光学透过率等。这与金刚石相似，但其性能数值均低于金刚石膜。类金刚石膜已开始用作耐磨涂层。
CAS号：
性质：又称山膜。碳的一种亚稳态，组成主要是碳，也含有氢，其量随工艺条件而异，最多时可达20％。类金刚石具有很高的硬度、高导热性、高绝缘性、良好的化学稳定性、从红外到紫外的高光学透过率等。这与金刚石相似，但其性能数值均低于金刚石膜。类金刚石膜已开始用作耐磨涂层。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条