Magnetorheological finishing technology for polishing super-smooth optical surfaces;

The fabrication and testing technology of the super-smooth X-ray optical components of the synchrotron radiation is a new emerging area, it works in the short-waveband and is one of the basic contents of the optics foundation engineering research of the soft X-ray.

Relation between ultra-smooth surface formation and polishing time;

Surface roughness of supper-smooth polishing glass is nano-scale,and working precision of ultra-precision polishing glass is molecular/atomic scale.

Residual Stress Analysis of Glass-ceramic Super Smooth Surface;

Study on Controlling the Super Smooth Surface Roughness of Optical Components;

Study on Ultra-smooth Surface Polishing Based on Liquid Two-dimension Vibration;

A new development of ultra-smooth surface machining technology;

Study on Elastically Constrained and Dissociated Abrasive Polishing for Ultra-Smooth Surfaces;

Aimed at the polishing technology of common material(Zerodur) used in reflecting mirror of laser gyro,a sophisticated supersmooth surface polishing method,stable eccentric immersed polishing method,was introduced.

Polishing experiments for Zerodur ceramic glass has been carried out in the equipment, supersmooth surface with roughness in the rang of nanometer and minornanometer has been producted steadlly.

This paper is a summary about our current work on supersmooth surface by float polishing.