In this paper,we studies the super-smooth surface polishing of the LaAlO 3 crystal by means of the chemical-mechanics polishing method and the atomic force microscopy (AFM) tool.

Residual Stress Analysis of Glass-ceramic Super Smooth Surface;

Study on Controlling the Super Smooth Surface Roughness of Optical Components;

Study on Ultra-smooth Surface Polishing Based on Liquid Two-dimension Vibration;

A new development of ultra-smooth surface machining technology;

Study on Elastically Constrained and Dissociated Abrasive Polishing for Ultra-Smooth Surfaces;

Aimed at the polishing technology of common material(Zerodur) used in reflecting mirror of laser gyro,a sophisticated supersmooth surface polishing method,stable eccentric immersed polishing method,was introduced.

Polishing experiments for Zerodur ceramic glass has been carried out in the equipment, supersmooth surface with roughness in the rang of nanometer and minornanometer has been producted steadlly.

This paper is a summary about our current work on supersmooth surface by float polishing.

The precision measurement of ultra smooth surface roughness is most important part of the precision manufacture.

Nano-particle colloid jet polishing is a new kind of ultra-precision machining technology which has important research and application value in fabricating ultra smooth surface.

Effect of hardness of nano-sized abrasives on roughness of polished super-smooth surface;

Study on super-smooth surface machining technology for sapphire wafer;

Preparation of super-smooth surface on crystal or glass has become,one of the key problems in precision process with the developments in optics,microelectronics,space and laser technologies.