In the nonmetal film production, there is an important significance to detect film thickness online.

The adhesion property of Au/NiCr/Ta multi-layered metallic films was investigated by the indentation method,rolling contact fatigue method and scratch method with both friction and acoustic emission modes.

Au/NiCr/Ta and Au/NiCr metallic multilayers were deposited on A1203 substrate by magnetron sputtering and their critical load (La) was studied by scratch method with friction and acoustic emission mode, moreover, the scratch curve and morphology of metallic films were compared with TiN film.

The relationship between resistivity of metallic film and its surface roughness, residual stress was investigated according to experimental results.

A unified model for 1/f noise and 1/f~2 noise due to electromigration in metal film;

Application of metal film thermal resistor to pressure sensor;

A group of experiments of metal film preparation and physical property measurement;

Mechanical properties of metal thin film characterized by trilayer microbridge testings;

Based on the hyperbolic two-step thermal conduction model,the two dimensional thermo-mechanical coupling of metal thin film under short pulse laser heating is investigated with finite element method.

Relationship between plating and magnetron sputtering for metallic films;

Several methods to improve the linearity of anisotropic magnetoresistance (AMR) sensors were suggested based on the analysis of the generation of nonlinearity in magnetoresistive sensors of metallic films.

Applying Green s function approach and the hobo formula,we have calculated the conductivities of metallic wires and metallic films,these formulas are foundto associate with size of metal,and possess the quantum size effects.