The Primary Study of Superpolishing of LiGaO 2 Single Crystal for a Substrate of GaN Thin Film;

The definition of supersmooth surfaces and the factors influencing the superpolishing quality are presented in this paper.

This paper introduces the operating scheme of ultra-precision polishing machine and its control requirements.

In view of this, this thesis proposes the use of abrasive flowing machining technology for ultra-precision polishing of nozzle.

Surface roughness of supper-smooth polishing glass is nano-scale,and working precision of ultra-precision polishing glass is molecular/atomic scale.

Aiming at these problems, an intelligent controlling system which is fit for polishing for high precision and high efficiency is put forward in the paper, and this system is applied to the ultraprecision planarization machine with conditioning ring at nanometer level.

This paper aims at the circs of that it mainly depends on the workers experience during the process of ultra-precision lapping and polishing, and exists strong subjectivity, no considering choosing procedure at the point of view of saving time, so a resolving method to design the system of process optimum and intelligent control was presented.