Finally,a new super-high speed polishing method of diamond films has been proposed,which was aided by the rare earth metal.

This papar introduces mainly the high accuracy mould-core of (2×2) optical array that it's made by reproducing of electrontyping technology and ultrasonic polishing method.

This article turns round ultrasonic polishing about nano-composite ceramics to divide into four stages in the foundation which analyzes to polishing mechanism.

To explore mechanisms of decreasing surface roughness during the ultrasonic polishing,the mode of the ultrasonic polishing should be established.

The different polish rate for different polish material cause dishing.

The influence of the parameters during the polishing process such as the types of polishing powder, the polishing speed, the characters of the polishing glass, on the properties of the polished components has been studied, and the detailed analysis has been made based on the polishing theory.

The study indicates that the thickness of slurry layer increases with increasing polishing speed and the increasing trend decreases with increasing polishing rotational speed.