In order to reduce the loads of calculating its objective function,not only the overall production process has been divided into subprocesses but also the model has been simplifiedTo compensate the degradation of calculation accuracy resulted from simplification of the method,Petri net has been induced to verify the adequacy of the obtained .

This article proposed a detailed process on how to build timed color Petri nets model of single-robot dual-chamber cluster tools using CPN Tools developed by University of Aarhus.

A Comprehensive Studies on the Eastern Occultism—Studies on the thought of Sapeheli;