1) Micropressure Transducer
微压传感器
1.
The Role of Four-electrode Chemical Etching in Production of Micropressure Transducer;
四电极电化学腐蚀在微压传感器制造中的应用
2) micropressure sensor
微压传感器
1.
Novel method used to measure sensitivity of piezoelectric micropressure sensor;
测量压电式微压传感器灵敏度的新方法
2.
A new model of SOIM micropressure sensor is designed with electrostaticclose-joint technique of silicon boracium silicate glass and thinning technique of single crystalsilicon micrometer grade，acquiring the prepardtion method of this structure and itscharacteristics：high-temperature resistance, anti-shock, high limited pressure.
采用硅－硼硅酸盐玻璃静电封接技术、单晶硅微米级减薄技术和金属膜制做技术，设计了一种新型ＳＯＩＭ结构微压传感器，并对其结构、特性和制作过程进行了研究。
3) micro-machined low-pressure sensor
硅微微压传感器
4) piezoelectric micro-pressure sensor
压电微压传感器
1.
Novel type piezoelectric micro-pressure sensor which is composed of sensing element, inner preamplifier, isolation frame, fasket, cover board and shell has been developed.
研制了一种新型的压电微压传感器，它主要由敏感元件、内置前置放大器、塑料支架、垫圈、盖板和外壳组成，敏感元件为单晶片结构。
5) micro gas pressure sensor
微气压传感器
1.
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate,an automatic control system were established,which could maintain steady vacuum degree.
针对微热板式微气压传感器的动、静态性能测试,建立了一套保持真空度稳定的控制系统。
2.
To realize the real-time control of vacuum environment in the static and dynamic performance test of micro gas pressure sensor with micro-hotplate, simulations to the vacuum testing environment were carried out.
针对微热板式微气压传感器的静态和动态性能测试,对传感器的真空测试环境进行了实时控制仿真。
3.
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate,an automatic control system were established,which could maintain steady vacuum degree.
针对微热板式微气压传感器的动、静态性能测试,建立了一套保持真空度稳定的控制系统。
补充资料：无弹性架压磁测力传感器压头
无弹性架压磁测力传感器压头
无弹性架压碰测力传感器压头
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条