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1)  SmCo(Al,Si) thin film
SmCo(Al,Si)/Cr薄膜
2)  SmCo/Cr thin film
SmCo/Cr薄膜
1.
SmCo/Cr thin film had prepared by magnetron sputtering more target together.
采用多靶射频磁控共溅射方法制备了SmCo/Cr薄膜,用XRD和VSM测量了各样品的微结构和矫顽力。
3)  Si/Al/Si film
Si/Al/Si薄膜
4)  Cr-Si-N coating
Cr-Si-N薄膜
1.
Cr-Si-N coatings by incorporating several atomic percentage of Si to CrN were prepared,using an arc ion plating method.
利用电弧离子镀方法,在(SCM415)钢基体上制备了Cr-Si-N薄膜。
5)  Al-Si-SiO_2 films
Al-Si-SiO_2薄膜
6)  SmCo thin film
SmCo薄膜
1.
Effect of Cu underlayer on magnetic properties of SmCo thin films;
Cu底层对SmCo薄膜磁性能的影响
2.
SmCo thin films were prepared by DC magnetron sputtering and the relations between the technological parameters and its depositing rate were studied.
用直流磁控溅射方法制备了SmCo薄膜,通过正交设计实验考察了工艺因素对薄膜沉积速率的影响规律。
3.
With the results of EDS、XRD、VSM and STM, we can get the following conclusions: (1)The effect of sputtering parameters on magnetic properties of SmCo thin films is obvious.
本文采用磁控溅射方法制备了SmCo系列单层和多层磁性薄膜,并采用X射线能量色散谱仪(EDS)、X射线衍射分析仪(XRD)、振动样品磁强计(VSM)和扫描隧道显微镜(STM)等对薄膜的成分、结构、磁学性能和表面形貌进行了研究,研究发现: (1)溅射工艺参数对SmCo薄膜磁性能的影响明显。
补充资料:Cr-Si thin film resistor
分子式:
CAS号:

性质:以铬和硅为主成分的薄膜高阻材料。具有电阻率高、稳定性好、电阻温度系数小等特点。控制硅化物结构,可得到各种电性能材料。如随铬增加,电阻率下降,电阻温度系数可从负数逐渐变到正值,一般方阻3~5kΩ,电阻温度系数(100~150)×10-6/℃。采用溅射、电子束蒸发、真空蒸镀等方法制取,主要用于制作薄膜混合集成电路中的薄膜电阻器。

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