1) MEMS standard process
MEMS标准工艺
2) C-MEMS technology
C-MEMS工艺
1.
Fabricating biochip carbon microelectrodes by C-MEMS technology;
生物芯片碳微电极的C-MEMS工艺研究
3) MEMS technology
MEMS工艺
1.
A membrane structure for gas sensor based on MEMS technology is presented,and the technology for the gas sensor are showed.
提出了一种基于MEMS工艺的薄膜型气敏元件结构,对其工艺进行了阐述。
5) MEMS process
MEMS工艺
1.
Here,we introduce a new MEMS process-EFAB process, and use it to design a micro-coil antenna for implantable RFID.
首先说明可植入RFID天线设计的基本参数要求,然后介绍一种标准的MEMS工艺——EFAB工艺,并利用该工艺标准的设计规则进行可植入RFID天线的结构设计,最后通过仿真验证该线圈天线符合可植入RFID的工作要求。
2.
A kind of high temperature micro pressure sensor based on model identification using this method is introduced, which is realized by MEMS process.
传感器件由MEMS工艺来实现,信号激励与信号处理由计算机来完成。
6) CMOS MEMS
CMOS MEMS工艺
1.
As the improvement of the CMOS MEMS process, people are putting more efforts on the sensors on chip, which have the virtue of small volume, low power, and high sensitivity, cheap, portable.
随着CMOS MEMS工艺的进步，人们努力尝试采用这种工艺来制作传感器，这种传感器体积小、功耗低、灵敏度高、携带方便；而且可以批量生产降低成本。
补充资料：德国国家标准(见德国标准化学会、德国标准体系)
德国国家标准(见德国标准化学会、德国标准体系)
National Standards of Germany: see Deutsches Institut für Normung, DIN;standards system of Germany
Oeguo Guol心日icozhun德国国家标准(Natio.吐S加Ln山切曲of Gen”旧ny)见德国标准化学会;德国标准体系。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条