A performance evaluation system,which consists of shortterm performance indices and long-term performance indices,is presented for scheduling semiconductor wafer production line.

Electroless Ni/Au UBM Process and Equipment For Semiconductor Wafer

Improved scheduling strategy for batching tools in semiconductor wafer fabrication;

Research on dynamic dispatching rule for semiconductor wafer fabrication;

Research of Scheduling Strategies for Batching Tools in Semiconductor Wafer Fabrication;

Multi-agent-based dynamic scheduling method for semiconductor wafer fabrication facilities;

Scheduling for batch processing machines is one of the most important parts of semiconductor wafer fabrication facilities scheduling, which has important impacts on improving performance of semiconductor wafer fabrication facilities.

Complete modification rescheduling method for semiconductor wafer fabs;

Based on the summarization of state-of-the-art release policies,the system dynamics model for solving release policies for the semiconductor wafer fabs was proposed.

Imitating collective activities of ant colonies, swarm intelligence based scheduling model was proposed for semiconductor wafer fab, realizing mutual complementation between central optimized control and distributed dynamic control, which was composed of MAS with central optimized control style (C-MAS) and artificial ant colony MAS with distributed dynamic control style (D-MAS).

Predictive model of semiconductor manufacturing line based on RBF neural network;

Satisfactory scheduling for semiconductor manufacturing line based on multi-object;

It is inportant to study the semiconductor manufacturing line.