Many basic parameters of variable-capacitance micromechanical accelerometer such as frequency,nonlinear ,resolution, are decided by its structure firstly.

According to the operation principle of variable-capacitance micromechanical accelerometer, this paper establishes its mechanics model by analysis, and gives relevant movement equations, then gives dynamic controllable m.

Using the switching capacity circuit to realize the C-V convert and using the feedback of the electrostatic force to realize force-balance closed-loop control, the micro-mechanical capacitive accelerometer is designed.

Automatic measuring system of MEMS accelerometer;

Digital integrated interface of MEMS accelerometer;

The output of MEMS accelerometer is influenced by the environment temperature.

This paper studies the mechanics of micromechanical resonant accelerometer,and creates the mathematical model of the first-level sensing structure,lever structure and the second-level sensing structure.

This paper analyses the work mechanism of Si-based micromechanical resonant accelerometer,presents a new structural style and makes the structure optimization design and simulation calculation.

The platform for measuring resonance-based micromachined accelerometer;