Using the switching capacity circuit to realize the C-V convert and using the feedback of the electrostatic force to realize force-balance closed-loop control, the micro-mechanical capacitive accelerometer is designed.

Many basic parameters of variable-capacitance micromechanical accelerometer such as frequency,nonlinear ,resolution, are decided by its structure firstly.

According to the operation principle of variable-capacitance micromechanical accelerometer, this paper establishes its mechanics model by analysis, and gives relevant movement equations, then gives dynamic controllable m.

Detection circuit design of MEMS capacitive accelerometer;

Study on automatic zeroing of capacitive accelerometer;

Features of three common structures of capacitive accelerometer were compared before pointing out the merits of finger-shaped micro-accelerometer of bias stationary structure.

Application of piezoelectric accelerometers in water pipeline leak locating;

Introduced the characteristics of the piezoelectric accelerometer such as small volume,low-weight,wide measure range.

The theory and application of vibration measurement by using piezoelectric accelerometer,charge amplifier and dynamic signal analyzerare introduced.

The noises for capacitive micro-accelerometer are the main obstacle to improving its performance.

The nonexclusive bias in the closed-loop measurement system of a capacitive micro-accelerometer was analyzed with a theoretical model of the mechanical and electrical characteristics.