1) thickness monitoring
膜厚监控
1.
The progress of optical thin film thickness monitoring;
光学薄膜膜厚监控方法及其进展
2) film thickness monitoring
膜厚监控
1.
Study on optical film thickness monitoring system by wideband spectrum based on LabVIEW;
基于LabVIEW的宽光谱膜厚监控系统的研制
2.
Determination of the film refractive index in realtime monitoring for wideband thin-film thickness monitoring;
为此,采用最小二乘法拟合,即在整个宽光谱范围内采集每个波长点的信息,所得结果误差很小,一般都在2%~5%之间,有时可达到10%,在很大程度上提高了实际镀膜时膜厚监控的精度。
3) film-thickness monitoring
膜厚监控
1.
The system stracture,coating parameters and results of the optical interference filters,using quartz crystal film-thickness monitoring and deposition controller,had been introduced in this paper.
讨论了通过改进离子辅助镀膜工艺提高T iO2薄膜折射率稳定性对于应用石英晶体膜厚监控技术的重要性。
4) stability in monitoring thin-film thickness
膜厚监控稳定性
