1) monitoring error of thickness of thin film
膜厚监控误差
2) erorr and thickness control
误差与膜厚监控
3) film thickness errors
膜厚控制误差
1.
Effect of film thickness errors on performance of soft X-ray multilayer;
膜厚控制误差对软X射线多层膜性能影响的分析
4) thickness monitoring
膜厚监控
1.
The progress of optical thin film thickness monitoring;
光学薄膜膜厚监控方法及其进展
5) film-thickness monitoring
膜厚监控
1.
The system stracture,coating parameters and results of the optical interference filters,using quartz crystal film-thickness monitoring and deposition controller,had been introduced in this paper.
讨论了通过改进离子辅助镀膜工艺提高T iO2薄膜折射率稳定性对于应用石英晶体膜厚监控技术的重要性。
6) film thickness monitoring
膜厚监控
1.
Study on optical film thickness monitoring system by wideband spectrum based on LabVIEW;
基于LabVIEW的宽光谱膜厚监控系统的研制
2.
Determination of the film refractive index in realtime monitoring for wideband thin-film thickness monitoring;
为此,采用最小二乘法拟合,即在整个宽光谱范围内采集每个波长点的信息,所得结果误差很小,一般都在2%~5%之间,有时可达到10%,在很大程度上提高了实际镀膜时膜厚监控的精度。
