1) LIGA technology
LIGA工艺
1.
The metal nickel was chosen as the material of latch mechanism,and the principle sample of latch mechanism and nickel standard sample were fabricated by LIGA technology.
选择金属镍作为定位机构材料,用LIGA工艺成功制备出定位机构的原理样机和镍标准样条。
2.
Planar windings manufactured by LIGA technology and silicon micromachine technology are connected with three-phase wye connection.
定子为平面线圈,是采用硅微机械加工技术和LIGA工艺制作的。
3.
The rotors and stators of the micromotor are all planar, the windings are made planar, grooveless and concentric using the LIGA technology and silicon micromachine technology.
定子和转子都做成平面结构,定子线圈采用了平面型、无槽式集中绕组;线圈之间采用了三相星形连接方式,采用了微机械LIGA工艺和硅微机械加工工艺;转子采用钕铁硼永磁材料,进行轴向充磁,成辐射状间隔分布。
2) LIGA process
LIGA工艺
1.
Application of DUV deep lithography in LIGA process;
深紫外深度光刻蚀在LIGA工艺中的应用
2.
Making method of high deep-width rate, batch production of planar windings with LIGA process and silicon deep etching process is researched .
较深入地研究了以LIGA工艺、硅深刻蚀工艺为主的平面绕阻的高深宽比、批量化制作方法。
3) UV-LIGA process
UV-LIGA工艺
1.
In order to fabricate the multiple electrodes, it's necessary to use the metal substrate to fabricate the ultra-thick SU-8 microstructures in the UV-LIGA process.
以金属为基底,采用UV-LIGA工艺来制作微细群电极,改进了前烘、后烘、显影等工艺参数,分别在铜和不锈钢基底上通过注射式倒胶的方法制作出厚度达1 mm的SU-8胶结构,最大深宽比达10∶1,并通过微细电铸,获得了铜微细电极。
4) Quasi-LIGA process
准LIGA工艺
5) quasi-LIGA technology
准LIGA制作工艺
6) lithography galvanoformung abformung process
LIGA加工
补充资料：采气工艺(见天然气开采工艺)
采气工艺(见天然气开采工艺)
gas production technology
，一‘J\匕乙吕天然气开采工艺pro以uetionteehnology)见
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条