2) Electron assistant hot filament CVD
电子增强热灯丝CVD方法
3) HFCVD
热丝CVD
1.
To improve the quality of Ta Spinnerets with high hardness and alkali-proof corrosion,HFCVD is used to deposit crystalline diamond films with different sizes of grain on carbonized Ta spinnerets.
为改善钽喷丝头的品质,提高其硬度和耐碱腐蚀能力,利用热丝CVD制备不同粒径的金刚石薄膜,并通过对钽衬底的碳化处理,成功使之沉积于纯钽喷丝头表面,对纯钽喷丝头进行表面强化。
2.
The effects of none-diamond phase carbon components of diamond thin film on the morphologies of diamond grains in diamond thin film made by HFCVD were studied by means of Ramanspectra and SEM.
应用Raman光谱和SEM方法研究了在用热丝CVD方法生长金刚石薄膜中,生长膜中非金刚石相碳成分对金刚石晶粒晶形的影响。
3.
The effect of the deposition conditions on the graphite or amorphous carbon component in the formation of diamond thin films by HFCVD method was studied.
在用热丝CVD方法生长金刚石薄膜中,研究了生长条件对制备膜中石墨和非晶碳成份的影响,发现较高的碳源浓度或较低的衬底温度会使制备膜中非金刚石相碳成份增加。
6) hot-filament CVD
热丝CVD
1.
Preparation of free-standing diamond thick films of large area and high quality using hot-filament CVD method
热丝CVD法制备大面积高质量自支撑金刚石厚膜
补充资料：灯丝
1.电灯泡或电子管内的金属丝。通电即发光﹑发热或产生射线。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条