1) electron beam evaporation plating
电子束蒸发镀
1.
In this present paper,the operation technology for preparation of aluminium-chromium alloy coating by electron beam evaporation plating was studied.
研究了电子束蒸发镀沉积Al-Cr合金涂层的工艺 ,探讨了铬含量对涂层耐蚀性的影响 ,对涂层的物相、形貌以及热处理对涂层和基体之间热扩散的影响进行了分析 。
2) electric beam evaporation deposition
电子束蒸发镀膜
1.
The spatial distribution of plasma in the reactor of an electric beam evaporation deposition device had been measured by a Langmuir probe.
56MHz、功率200W、加速栅压-200V和减速栅压+85V条件下,电子束蒸发镀膜反应室内的等离子体空间密度分布,以及不同放电气压和不同偏压下反应室内的等离子体密度分布。
3) E-beam evaporation
电子束蒸镀
1.
01)O thin films which has been prepared on the (001) plane of Si substrate by the method of e-beam evaporation.
用X射线衍射方法分析了在Si(001)衬底上电子束蒸镀制备的Zn0。
2.
050O thin films prepared by method of e-beam evaporation on Si substrate at 200~500℃for substrate temperatures(Ts) are characterized using x-ray diffraction method, which shows all these films orientating well along \ except the film prepared at 200℃ and having similar crystal parameters.
在200~500℃的衬底温度范围内,用电子束蒸镀法在Si衬底上制备了沿[002]取向的Zn0。
3.
ITO film used in semiconductor LED process is fabricated with vacuum E-beam evaporation.
用真空电子束蒸镀的方法制备半导体发光二极管LED所用的ITO膜,然后在N2气环境中进行快速热退火(RTA)处理,对ITO膜的各项特性进行测试分析。
4) electron beam evaporation
电子束蒸镀
1.
Characteristics of chromium-aluminum-silicon dioxide thin films deposited on PMMA glass substrate by electron beam evaporation process;
有机玻璃基材表面电子束蒸镀铬-铝-二氧化硅薄膜及其性能研究
2.
ZnO;Al(ZAO) films were prepared by electron beam evaporation on Si (100) substrates, followed by annealing in oxygen ambient from 400℃ to 800℃.
采用电子束蒸镀方法在Si(100)衬底上沉积了ZnO:Al(ZAO)薄膜。
5) reactive e-beam evaporation
电子束反应蒸镀
6) electron beam coating equipment
电子束蒸镀设备
补充资料:电子束蒸发(electron-beamevaporation)
电子束蒸发(electron-beamevaporation)
电子束蒸发是一种清洁的金属薄膜淀积工艺。由热丝发射的电子经过聚焦、偏转和加速以后形成能量约为10keV的电子束,然后轰击放在有冷却水套的容器中的金属并使之蒸发。蒸发的金属在置于附近的衬底(如硅片)上淀积,从而获得有一定厚度的金属镀层。电子束蒸发具有沾污轻和适用范围广的优点,但不适用于多元合金及易被电子束分解的化合物。铝受电子束轰击激发出的特征X射线会对器件造成损伤。电子束还可能使真空室内残余气体和一部分蒸发的金属原子电离。电子束蒸发在半导体集成电路中的主要应用是引线金属化层的淀积。
说明:补充资料仅用于学习参考,请勿用于其它任何用途。
参考词条