1) corrosion in hot and humid environments
湿热腐蚀
3) wet etching
湿法腐蚀
1.
Research on wet etching technique for SiGe HBT emitter mesa for mation;
SiGe HBT发射极台面湿法腐蚀技术研究
2.
To avoid the under-cutting phenomenon caused by the anisotropy of wet etching technology in the machining process of micro accelerometer,mask patterns for compensation should be designed according to the requirement of etching speed and depth before corrosion,then perfect shape of convex corner can be obtained after a given etching time.
为了避免微加速度计在加工过程中,由于湿法腐蚀的各向异性而造成的凸角处产生削角现象,必须根据各个晶向的腐蚀快慢特性和腐蚀深度的要求,在腐蚀开始前设计好补偿的掩膜图形,使之在特定的腐蚀时间后显现出理想的凸角形状。
3.
In this paper,the processing on wet etching,metal sputtering,sintering of source and drain contacts were discussed in detail.
具体讨论了湿法腐蚀进行隔离台面,磁控溅射制作电极,快速热退火制作源漏低阻的欧姆接触等工艺步骤。
4) Wet etch
湿法腐蚀
1.
In this paper, process parameters of micromachined pressure sensor are obtained through the research of fabrication process of silicon-based micromachined pressure sensor, especially the wet etching process of microcaves.
微压力传感器是一种应用广泛的传感器，本文通过研究硅基微压力传感器相关的制备工艺，特别是微硅腔的湿法腐蚀工艺，确定了微压力传感器的制备工艺参数。
5) wet-etching
湿法腐蚀
1.
The wet-etching of GaAs in different chemical bathes is discussed.
提出了一种研究半导体湿法腐蚀进程的红外热像法。
2.
Using bulk-silicon micro-mechanical technique by crystal characters of (110) silicon,in which photolithography,reaction ion etching,and wet-etching technique are included,micro-mirror,cantilever beam,torsion beam,and fiber orientation slots are fabricated simultaneously on (110) silicon.
采用基于湿法腐蚀工艺的体硅微机械加工方法 ,利用 (110 )硅片结晶学特性 ,通过光刻、反应离子刻蚀和湿法刻蚀等工艺 ,在硅片上同时制作出微光开关的微反射镜结构、悬臂梁结构、扭臂梁结构和光纤定位槽结构 ,器件的一致性好 ,制作工艺简单 。
3.
SOI waveguides fabricated by wet-etching method are demonstrated.
用化学湿法腐蚀的方法制作了SOI光波导 ,并且用三维波束传播方法分析和设计了单模波导和 1× 2 3dB多模干涉分束器 ,修正了有效折射率和导模传输方法的误差 。
补充资料：湿热
湿热 湿热 ①病因学名词。指病邪。湿和热相结合的病邪。致病可分别引致脾胃、肝胆及下焦大肠、膀胱等脏腑或皮肤筋脉的病证。《素问·生气通天论》：“湿热不攘，大筋软短，小筋弛长，软短为拘，弛长为痿。” ②病证名。吴坤安于《伤寒指掌》卷四中描述此证：“脉濡细而数，发热身痛，小水短涩；或身目俱黄，属湿热。宜五苓散加生栀、黄柏、茵陈、秦艽。”
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条