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1)  polycrystal SiC films
多晶碳化硅薄膜
2)  amorphous silicon carbon films
非晶氢化硅碳薄膜
3)  polycrystalline silicon film
多晶硅薄膜
1.
Effect of hydrogen dilution on structure and optical properties of polycrystalline silicon films;
氢稀释对多晶硅薄膜结构特性和光学特性的影响
2.
Control of grain size during low-temperature growth of polycrystalline silicon films;
多晶硅薄膜低温生长中晶粒大小的控制
3.
The origin structure of a-Si∶H films is closely related to the recrystallizaiton temperature,the grain size and electrical properties of polycrystalline silicon films,which were formed by recrystallization annealing of a-Si∶H films.
用a -Si∶H薄膜经退火晶化成的多晶硅薄膜 ,其晶化温度、晶粒尺寸和电性能与薄膜的初始结构有密切关系 ,而a -Si∶H薄膜的初始结构依赖于沉积条件。
4)  polysilicon thin films
多晶硅薄膜
1.
A novel method for electrically measuring the thermal expansion coefficient of polysilicon thin films is presented.
提出了一种新型多晶硅薄膜热膨胀系数的电测试结构,给出了热机电耦合模型和测试方法,并利用Coventor软件和ANSYS软件进行模拟和验证。
2.
A test structure to measure the diffusivity of polysilicon thin films is proposed.
本文提出了一种表面加工多晶硅薄膜的在线测试结构。
3.
An on-line test structure for measuring the thermal conductivity of polysilicon thin films is proposed.
提出了一种在线测试表面加工多晶硅薄膜热导率的结构 ,推导了热学模型 ,给出了测试方法 ,用 ANSYS验证了热学模型 。
5)  polycrystalline silicon thin film
多晶硅薄膜
1.
Study on low temperature electrical properties of polycrystalline silicon thin films deposited at low temperatures using SiCl_4/H_2;
SiCl_4/H_2为气源低温沉积多晶硅薄膜低温电学特性的研究
2.
Study of preparing polycrystalline silicon thin film by RTA
快速热退火制备多晶硅薄膜的研究
3.
Effects of thickness and grain size on Voc,Jsc,and ( of n +/p and n +/p p + polycrystalline silicon thin film solar cells have been calculated by PC1D.
利用PC1D计算了结构为n+ / p和n+ / p p+ 多晶硅薄膜太阳电池的晶粒尺寸和薄膜厚度对其Voc,Jsc和 η的影响。
6)  poly-Si thin films
多晶硅薄膜
1.
This article introduced the method of fabricating poly-Si thin films by aluminum-induced crystallization(AIC)of amorphous silicon, and described the general process of fabricating poly-Si thin films.
多晶硅薄膜在微电子和能源科学领域有着广泛的应用。
2.
Under the help of SEM measurement,the morphologies of the Poly-Si thin films were analyzed basing on the growing theory of poly-Si thin films,The result shows that columnar grains could be formed in thick films,and the thicker the films are,the larger the columnar grains grow.
在多晶硅薄膜(Poly-S i)生长理论的基础上,用等离子体化学气相沉积(RF-PECVD)系统,配合快速光热退火装置(RTP),在玻璃衬底和石英衬底上制备了柱状结构的多晶硅薄膜。
3.
In this thesis, the fabrication of high quality poly-Si thin films is investigated.
随着第三代太阳能电池——薄膜太阳能电池的深入研究,要提高多晶硅薄膜太阳能电池的光伏转换效率,制备高质量的多晶硅薄膜是从本质上解决问题的一个途径。
补充资料:多晶
分子式:
CAS号:

性质:多晶(体)是众多取向机遇的单晶(体)的集合。多晶与单晶内部均以点阵式的周期性结构为其基础,对同一品种晶体来说,两者本质相同。两者不同处在于单晶是各向异性的,多晶则是各向同性的。在摄取多晶衍射图或进行衍射计数时,多晶样亦有其特色。多晶体中当晶粒粒度较小时,晶粒难于直观呈现晶面、晶棱等形象,样品清晰度差,呈散射光。这种场合的多晶亦常称作粉晶(powder crystal)。

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