The paper introduces the study and applications of microscale RE components, including micromechanical inductors, micromechanical capacitors, micromechanical resonators, micromechanical filters, micromechanical switches and micromechanical antennas.

The measurement technique and theory of micromechanical resonators assisted by clamped-clamped beam were studied,mainly focusing on problems of signal actuating and detecting brought by feebleness of signal and terrible parasitic effects in the chip level electrical measurement of capacitive RF micro-resonators.

High acceleration movements of a precision stage result in reaction forces that lead to mechanical resonance in the stage,which reduces the tracking accuracy and lengthens the positioning time.

With the advantages of using a ring as the attracting mass when the interaction distance can be shortened down to 2 cm or less and using the mechanical resonance method when the amplitude of the torsion balance can be amplified by Q times, it is expected that the test of the Newtonian inversesquare law of gravity can be carried out at a high accuracy of about 2.