1) electrostatically-actuated microbeam
静电致动微梁
2) electrostatic microactuator
微型静电致动器
1.
The system level model of capacitive electrostatic microactuator based on Modelica is established and simulating results shows that Modelica can be effectively applied to the multi-domain modeling and the simulation of MEMS.
分析了现有的MEMS系统级建模与仿真方法,讨论了运用Modelica语言进行面向对象的非因果关系建模方法,建立了基于Modelica的电容式微型静电致动器系统级模型,仿真结果证明了Modelica用于MEMS系统级多领域仿真的可行性。
3) electrically actuated microbeam
静电驱动梁
1.
A nodal analysis model of electrically actuated microbeams was developed based on a weighted residual method.
采用加权残余法建立了静电驱动梁单元的节点法模型,在HSPICE中构建了相应的等效电路模型。
4) Cascade V-shape beam electrothermal actuators
复合V型梁电热硅微致动器
5) electrostatics comb actuator
静电梳齿致动器
6) piezoelectric micro-actuator
压电微致动器
1.
A new piezoelectric micro-actuator for positioning a magnetic head for a highdensity hard disc device has been designed,and fabricated.
目的是设计和制作一种新型压电微致动器,用于高密度硬盘磁头的精确定位。
补充资料：动微
1.洞察精微。
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