We design and fabricate two kinds of piezoelectric micro gyroscopes with PZT thin film as actuating and sensing material at the same time,for PZT film has piezoelectric and reverse piezoelectric effect.

A novel piezoelectric micro gyroscope is designed and fabricated on silicon crystal, with an IC compatibe technology.

The sensitive mechanism of micro airstream gyroscope was explained by calculating the distributing of stream field in the sense organ.

Study on error source of miniature hemisphere gyroscope;