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Dynamic Analysis and Mathematical Model of Silicon Micromechanical Vibration Gyroscope;
微型陀螺仪的力学分析和数学模型
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Keywords: micro-gyroscope, silicon single crystal, three-axis angular-rate sensing, natural frequency and mode shapes.
关键词:微型陀螺仪、单晶、轴角速率感测、动自然频率与模态。
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A novel closed-loop vacuum silicon microgyroscope
一种新型的闭环真空硅微陀螺仪(英文)
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Mathematical model for frame vibratory micromechanical gyroscopes and analysis of its working state;
框架式硅微陀螺仪的数学模型及工作状况分析
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Mathematical Model of the Micromechanical Comb Drive Tuning Fork Rate Gyroscopes;
梳驱动音叉式微速率陀螺仪的数学模型
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Study on Temperature Compensation for MEMS Gyro Based on Semiparametric Regression Models
基于半参数回归模型的微陀螺仪温度补偿技术
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Design and Fabrication of a Bulk Micromachined Vibratory Tunneling Gyroscope
新型微机械隧道陀螺仪的设计和工艺制备
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Mechanical-electrostatic coupling and distortion research for MEMS line vibration gyroscope
微型线振动陀螺仪中机械静电力耦合变形研究
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gyro-meter type tachometer
陀螺测试仪型转速计
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electrically suspended gyroscope
静电陀螺仪静电陀螺仪
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Research on Differential Equations Model of Mocro Gyroscope and Its Disturbances;
一种微陀螺仪的微分方程模型及其干扰因素的研究
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Structure Design and Optimization of the Novel Micro-Gyroscope Based on Meso-Piezoresistive Effect
基于介观压阻效应的新型微陀螺仪结构设计与优化
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System design and simulation of microelectromechanical hybrid gyroscope
微机电混合陀螺仪的系统设计与仿真
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Driving-mode test of dual-mass MEMS gyroscope
双质量硅微陀螺仪驱动模态测试(英文)
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electrical suspended gyroscope
电悬式陀螺仪;静电支承陀螺仪;静电支承陀螺仪
16.
Study of the Driving Method of the Vibrating Wheel
振动轮式微机械陀螺仪闭环驱动控制方法研究
17.
Study on Key Technologies of Silicon Microgyroscopes for Improving Performance;
提高硅微陀螺仪性能若干关键技术研究
18.
Analysis of Residual Stresses on Micromachined Z-Axis Vibrating Rate Gyroscope and Structural Optimization Design;
z轴硅微陀螺仪残余应力分析及结构优化研究