1) Single Wafer
单晶圆
2) Ge single crystal piece
锗单晶圆片
1.
9mm Ge single crystal piece ,And has used A,B,the C three kind of choice point plans,Result show that B plan can test electronic resistivity and nonuniformity of Ge single crystal piece with the few test points,It reflected the real performance and reliability of the material,And it simplified the experimental procedure.
9mm的半导体锗单晶圆片的电阻率进行测定,并采用了A、B、C等三种选点方案,结果表明:方案B用少量的测试点就能测定和计算出锗单晶的电阻率和不均匀性,它不仅反映出材料的真实性和保证其可靠性,而且简化了试验程序。
3) Single-Wafer Cleaning
单晶圆清洗
5) single wafer processing
单晶圆处理方式
6) automatic single wafer polishing machine
自动单晶圆抛光机
补充资料:直径6英寸硅单晶及单晶炉
直径6英寸硅单晶及单晶炉
巍 户亡‘砚.士释L朴品及沪晶护万引门l
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