1) scan exposure
扫描曝光
1.
By establishing an abstract scan exposure model and analyzing the pulse to pulse energy fluctuation characteristics of DUV excimer lasers,a real-time dose regulation is implemented based on closed loop feed back control,which especially focuses on reducing the pulse energy overshot and the pulse to pulse stochastic fluctuation.
通过建立扫描曝光过程的抽象模型并分析准分子激光器单脉冲能量波动特性,提出采用闭环反馈控制进行实时调节,着重研究了抑制单脉冲能量超调和随机波动的有效算法。
3) Continuous exposure scans
连续曝光扫描
4) electron beam scanning exposure
电子束扫描曝光
5) scanning projection printing
扫描式投影曝光
6) Immersion scanning exposure tools
浸液式扫描曝光机
补充资料：扫描电子显微镜(见扫描电子显微术)
扫描电子显微镜(见扫描电子显微术)
scanning eleetron mieroseoPe
扫描电子显微镜scanning eleetron mieroseope见扫描电子显微术。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条