MEMS jet-fluidic gyroscope utilizes the deflexion of gas,when angular velocity applied,to generate asymmetric temperature distribution on micro-suspend Pt wire,and give a differential voltage output subsequently.

using the finite element method, preceding three vibration models of the piezoelectric pump of the piezoelectric fluidic angular rate sensors has been obtained by a series of procedure, such as model building, meshing,loads applying and equation solving.

Study on noise mechanism of MEMS accelerometer for petroleum exploration;

Biaxial tiltmeter & application based on MEMS accelerometer;

Design and application of electronic compass based on magneto-inductive sensor & MEMS accelerometer

The micromechanical gyroscope is a kind of angular rate sensor which making use of the coriolis effect to measure angular rate.

The SAW angular rate sensor (SAW gyroscope) has already become the focus under study.

A model of angular rate sensor is presented which utilizes the circumrotation carrier抯 circumrotation to drive and be used for sensing the angular rate of pitching of circumrotation carrier.

Studying MEMS sensor of oil exploration;

In the telemetry of rocket and cannon projectiles,we can use IMU based on MEMS sensors to measure flying attitude of projectile.

Batch microassembly of MEMS sensors is limited by the manual manipulation required specially trained technicians.