1) electron cyclotron resonance ion source
电子回旋共振离子源
1.
An intense electron cyclotron resonance ion source for proton linac has been deve-loped.
研制了一台用于加速器驱动次临界系统 (ADS)的强流电子回旋共振离子源。
2) electron cyclotron resonance plasma
电子回旋共振等离子体
1.
The radicals of CHF3,C6H6 and CHF3/C6H6 plasmas were measured by a quadruple mass spectrometer and an optical emission spectrometer in an electron cyclotron resonance plasma chemical vapor deposition system.
在一个微波电子回旋共振等离子体化学气相沉积系统中,测量了CHF3、C6H6及其混合气体放电的质谱和发射光谱图,分析了等离子体中主要基团的分布及其产生的途径,研究了放电功率和流量对主要基团密度的影响,以及它们与氟化非晶碳薄膜沉积速率和键结构之间的关联。
4) ion cyclotron resonance method
离子回旋共振法
5) electron cyclotron resonance
电子回旋共振
1.
sputtering of Li3PO4 target coupled with electron cyclotron resonance (ECR) in N2 ambient.
用电子回旋共振(ECR)等离子体辅助射频溅射沉积法制备快锂离子传导的锂磷氧氮 (LiPON)薄膜。
2.
The numerical method for resolving the wave propagation and absorption of the electron cyclotron resonance(ECR) is proposed.
介绍了电子回旋共振(ECR)波的传播与吸收的数值求解方法。
3.
The effect of annealing on optical properties of the CN x films prepared by electron cyclotron resonance laser pulse assisted deposition was reported.
报道了退火对电子回旋共振 (ECR)辅助脉冲激光溅射方法制备的CNx 薄膜样品光学性质的影响 。
6) ECR
电子回旋共振
1.
Etching Techniques by an ECR Plasma Source;
电子回旋共振等离子体的刻蚀技术
2.
Numerical simulation of the physical process in ECR discharge;
电子回旋共振放电物理过程的数值模拟进展
3.
Diagnostic test with Langmuir probe of the electron cyclotron resonance (ECR) plasma source was modified to evaluate our lab built ECR plasma etching system.
电子回旋共振 (ECR)等离子体以其密度高、工作气压低、均匀性好、参数易于控制等优点在超大规模集成电路工艺中获得了广泛的应用。
补充资料：电子自旋共振(见电子回旋共振)
电子自旋共振(见电子回旋共振)
electron spin resonance
电子自旋共振eleetron spin resonanee见电子回旋共振。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条