1) self-sensitive cantilever
自敏感悬臂
2) a free floating sensing diaphragm
自由悬浮敏感膜
1.
A micromachined condenser microphone with a free floating sensing diaphragm and a perforated thick copper backplate is presented.
提出了一种具有自由悬浮敏感膜和带孔铜底板的硅微机械电容式麦克风。
3) cantilever be am/self-sensing actuator
悬臂梁/自感知执行器
5) cantilever acoustic sensor
悬臂式声传感器
1.
Using the pressure-frequency characteristic, the GaAs cantilever acoustic sensor based on RTD is designed and processed by the control hole technology firstly, and the process integration of RTD and micro-mechanical technology is implemented.
利用此压力-频率转换特性,首次设计并利用微机械控制孔技术加工制作了基于RTD的GaAs基悬臂式声传感器结构,实现了RTD与GaAs基微机械加工技术的工艺集成。
补充资料：自调自净自度
【自调自净自度】
（术语）同自调项。
（术语）同自调项。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条