The latest development of researches on nanotribology of micro-electromechanical systems (MEMS) was reviewed,including the features of friction and wear,the application of surface modification,and soild film lubrication as well as the ultra-thin film lubrication for MEMS.

Technique and application of PTFE solid lubricating film;

It is introduced the tribological characteristics of polyimide solid lubricating film, analyzed the affecting factors on tribological characteristics of polyimide solid lubricating film, and proposed research suggestions of polyimide solid lubricating film.

The main reason of failure is that the solid lubricating film formed by the polytetrafluoroethylene(PTFE)composite(the lining material of the friction plates)is easily spoilaged due to the poor heat resistance of PTFE.

Thin gas film lubrication theory and technology at nano scale , which is atthe frontier of nanotribology, has prosperous potential to be applied in theinterface technology of head/disk systems in computer hard disk drives andnano/microelectromechanical systems.

By contrasting the friction properties of the water lubrication film confined in two Si walls with that in the wall having electric double layer,it is easily got that the friction coefficient is generally larger than that with electric double layer, and the influence on the friction coefficient of the relative motion velocity between two walls havi.