1) porous SiCOH ultra-low-k film
多孔SiCOH薄膜
2) SiCOH films
SiCOH薄膜
1.
F-SiCOH films were prepared in electron cyclotron resonance chemical vapor deposition (ECR-CVD) system using DMCPS/CHF3 mixture.
根据薄膜结构和成分的傅立叶变换红外光谱仪(FTIR)、X射线光电子能谱(XPS)以及放电等离子体中基团分步的光强度标定的发射光谱(OES)分析可知:薄膜沉积速率的变化是由于CHF3进气量的增加导致薄膜生长从以沉积F-SiCOH薄膜为主过渡到以沉积氟化非晶碳(a-C:F:H)薄膜为主的结果。
2.
Carbon-doping oxide materials (SiCOH films) with k of 2.
62的SiCOH薄膜。
3.
Using decamethylcyclopentasioxane ([Si(CH 3) 2O] 5 as liquid pr ecursor, SiCOH films, which have low dielectric constant (low k), good insul ating ability and thermal stability, were prepared by electron cyclotron resonan ce chemical vapor deposition (ECR_CVD).
以十甲基环五硅氧烷为反应源、采用电子回旋共振等离子体化学气相沉积 (ECR_CVD)方法制备了具有低介电常数 ,且电绝缘性能和热稳定性优良的SiCOH薄膜 。
4) DF-CCP
SiCOH薄膜刻蚀
1.
12MHz/2MHz、60MHz/2MHz dual-frequency capacitively couple plasma (DF-CCP) of CHF3 and the etching of SiCOH film.
与传统SiO2介质的刻蚀相比较,由于SiCOH薄膜中存在孔隙,因此刻蚀率随着薄膜密度的降低而增加,从而导致薄膜粗糙度增加、侧向微枝结构的形成和刻蚀深度发生改变,结果难以实现SiCOH薄膜刻蚀过程的精确控制。
5) porous film
多孔薄膜
1.
Nanocrystalline titania porous films are prepared on glass substrates via a sol-gel dip-coating method from a tetrabutylorthotitanate solution that contains diethanolamine as the stabilizer of titanium alkoxide and polyethylene glycol (PEG) as a template.
以钛酸丁酯为无机原料、二乙醇胺作稳定剂 ,加入聚乙二醇 (PEG)作模板制备前驱体溶胶 ,通过溶胶 凝胶工艺和浸渍提拉技术在玻璃基片上制备了孔径在 10～ 10 0 0nm范围内可调的纳米TiO2 多孔薄膜 。
2.
ZnO porous films were prepared on glass substrates by PEG-assisted sol-gel method using Zn(CH_3COO)_2·2H_2O as precursor,ethanol as solvent and NH(C_2H_2OH)_2 as chelating agent.
以醋酸锌为前驱体,乙醇为溶剂,二乙醇胺为络合剂,通过聚乙二醇(PEG)辅助的溶胶———凝胶法在玻璃基片上制备了ZnO多孔薄膜。
3.
ZnO porous films were prepared on glass substrates by solgel method using polyethylene glycol (PEG2000) as organic template, Zn(CH_3COO)_2·2H_2O as precursor, ethanol as solvent and NH(C_2H_4OH)_2 as chelating agent.
以聚乙二醇(polyethyleneglycol,PEG2000)为模板剂,醋酸锌(Zn(CH3COO)2·2H2O)为前驱体,乙醇为溶剂,二乙醇胺[NH(C2H4OH)2]为络合剂,通过溶胶凝胶法在玻璃基片上制备了ZnO多孔薄膜。
6) porous films
多孔薄膜
1.
Nanocrystalline titania porous films were prepared on glass substrates with Ti(OC4 H9)4 as precursor and polyethy-lene glycol (PEG) as organic template by sol - gel process.
采用溶胶-凝胶技术,以钛酸丁酯[Ti(OC_4H_9)_4]为前驱体,加入聚乙二醇(polyethylene glycol,PEG)作为模板剂,在玻璃基片上制备了纳米氧化钛多孔薄膜。
2.
The forming mechanism of colloid crystal was discussed; the advantage of dip-drawing method to assemble PS template and fill SnO2 sol was exhibited; the influence of fabricating parameters on the array quality, the number of spheres and morphology of porous films was studied; and the structure and optical properties of PS.
本文采用浸渍-提拉法组装了PS胶体晶阵列,并以此为模板制备了SnO2有序多孔薄膜。
3.
Highly-ordered Nanocrystalline ZnO porous films with high thermal stability were synthesized using zinc acetate (Zn(CH_3COO)_2·2H_2O) as precursor and organic surfactant (polyethylene glycol (PEG), polystyrene spheres (PS)) as templates.
本实验以醋酸锌(Zn(CH_3COO)_2·2H_2O)为原料,以高分子表面活性剂(聚乙二醇PEG和聚苯乙烯微球PS)为模板,合成了热稳定性较好的ZnO多孔薄膜。
补充资料：多孔农用薄膜
分子式：
分子量：
CAS号：
性质：由具有许多孔眼而能自然调节温度的农用薄膜。日间温度升高时，能通过孔眼散热降温。夜间气温下降时，孔眼则被露堵塞、停止散热。因而温度波动较少。且薄膜棚内相对湿度较高，水的热容量很大，又能防止霜冻。此外，压力波动不大。这些都有利于农作物的生长和增产。
分子量：
CAS号：
性质：由具有许多孔眼而能自然调节温度的农用薄膜。日间温度升高时，能通过孔眼散热降温。夜间气温下降时，孔眼则被露堵塞、停止散热。因而温度波动较少。且薄膜棚内相对湿度较高，水的热容量很大，又能防止霜冻。此外，压力波动不大。这些都有利于农作物的生长和增产。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条