A Capactive Interdigital Transducer(CIDT) was used in capacitive Lamb wave device to solve the problem that the processes of function layers in most Lamb wave devices were incompatible with classical IC process.

New Equivalent Circuit Model of Interdigital Transducer and Its PSPICE Simulation;

To solve these problems, the properties of Lamb wave excited by interdigital transducer in the piezoelectric substrate covered by liquid were studied based on its piezoelectricity and anisotropy.

There is the excitation of bulk acoustic waves inside the substrate besides the excitation of surface acoustic waves along the substrate surface when interdigital transducer is powered by the electrical signal with one frequency.

The Making Technology of IDT;

When SAW is excited by the IDTs on the substrate,and BAW is excited as well Based on this principle,experiments to suppress BAW have been done by grooving on the back of the substrates such as ST,LT,LN with the filter center frequency of 28 MHz,70 MHz,71 MHz,120 MHz respectively The BAW suppression is observed and the experimental results are also given in this pape

The design and fabrication of acoustical waveguide and interdigital transducer (IDT) in the quasi-collinear acousto-optic tunable filter (AOTF) was investigated experimentally by using SiO2/In2O3 film on LiNbO3 substrate.

A method to simulate surface acoustic wave device(SAWD) is proposed,in which impedances of Mason equivalent circuits are equaled by LC networks called as subcircuit,and piezoelectric material between input and output interdigital transducers are equaled by non-loss transmission line with the same delay time.

The excitation of bulk acoustic waves(BAWs) by interdigital transducers(IDTs)is thoroughly studied in the structure consisting of piezoelectric crystal solid layer liquid.