1) microscopic interferometry
显微干涉法
1.
Curvature measurement of micro cantilever based on phase-stepping microscopic interferometry;
测量微悬臂梁曲率的相移显微干涉法
2) interference microscopy
干涉显微方法
3) micro interference
显微干涉
1.
In this paper, the grating′s ±1 order diffractive beams of the object′s measured surface are interfered each other by using the micro interference system.
采用显微干涉光路，使被测物体表面光栅的±１级衍射光相互干涉，用显微ＣＣＤ图象采集系统采集干涉后形成的倍增光栅，利用微网格法原理和信息转换技术提取每一幅倍增光栅图象的几何特征，确定被测物体表面的应变。
2.
By using a micro interference system, the surface gratings ±1 order diffractive beams become interfered with each other, and the multiplier grating caused by the interference is recorded by a micro CCD image gathering system.
提出采用显微干涉光路，使被测曲面上光栅的±１ 级衍射光相互干涉，用显微ＣＣＤ图象采集系统采集干涉后形成的倍增光栅，利用微网格法原理和信息转换技术提取每一幅图的几何特征，确定被测物体表面的应变。
4) Interference microscope
干涉显微镜
1.
Improvement and analysis of measuring thickness using interference microscope;
用干涉显微镜测量薄膜厚度的改进与分析
6) Microscopic Interferometry
显微干涉术
1.
Study on the Dynamic Testing Methods and System of MEMS Based on Microscopic Interferometry;
基于显微干涉术的微机电系统动态测试方法与系统的研究
补充资料：高分辨电子显微镜(见高分辨电子显微术)
高分辨电子显微镜(见高分辨电子显微术)
high resolution electron microscope
高分辨电子显微镜high resolution eleetronmieroseope见高分辫电子显微术。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条