1) microforce sensor
微力传感器
1.
Microforce Sensors Based on Microcantilevers with Two Piezoelectric PZT Thin-Film Elements;
基于双压电PZT薄膜单元的悬臂梁式微力传感器研究
2.
A novel microforce sensor with microcantilever structure based on PT/PZT/PT piezoelectric thin films is proposed.
提出了一种基于PT/PZT/PT压电薄膜微悬臂梁结构的微力传感器。
2) micro force sensor
微力传感器
1.
A novel three-dimensional micro force sensor based on MEMS technology was developed in symmetry of structure.
开发了一种基于MEMS技术制作的三维微力传感器,传感器为完全对称结构,由4根垂直放置和1根悬臂放置的硅梁连接而成。
2.
As a micro force sensor,a non capsulated 1MHz extension quartz resonator is damped by hydrodynamic forces when approaching an object.
以谐振频率为 1MHz的未封装伸长型晶振作为微力传感器逼近样品表面 ,在此过程中晶振受到流体阻尼 ,其振动特性发生变化 ,通过检测振动幅值的变化即可获得样品表面形貌信息。
3.
A square structure 3 dimentional micro force sensor by using silicon semiconductor is developed and could be changed into a 5 dimentional micro force sensor by only a small modifying.
采用硅基应变片设计了一种可用于精密微装配作业过程,检测x、y、z方向微接触力的三维微力传感器;经微小改动后,该传感器可成为五维微力传感器。
3) tri-axial micro-force sensor
三维微力传感器
1.
In order to satisfy this request,a novel micro-gripper integrating tri-axial micro-force sensor,based on the technology of piezoresistive detection,is presented.
因此,该文提出了一种以压阻检测技术为基础,集成三维微力传感器的微夹持器。
4) microstress sensor
微应力传感器
1.
Based on this phenomenon,the research concerns on a Mach-Zehnder interferometer waveguide microstress sensor of cantilever beam structure,its basic principle is introduced,and the linear relation between stress and phase difference is also formulated,the sensitivity and measuring range are determined,at last the bending loss is analyzed.
基于此研究了一种Mach-Zehnder干涉仪型悬臂梁式光波导微应力传感器,分析了它的基本工作原理,并计算出施加外力与相位差之间的线性关系,确定了微应力传感器的灵敏度和量程,最后分析了它的弯曲损耗。
6) pressure microsensor
压力微传感器
1.
The fabrication and the test of the diamond pressure microsensor have been discussed.
在Φ50mm〈100〉硅单晶衬底上用热丝CVD法生长本征多晶金刚石薄膜作为绝缘隔离层,通过掩模选择性生长法得到掺硼金刚石薄膜电阻条,再经金属化处理和腐蚀硅压力腔,得到了压阻式金刚石压力微传感器的原型器件。
补充资料：微力
1.微小的能力;微薄的力量。常用作谦词。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条