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1)  (Zr,Al)N coatings
(Zr,Al)N薄膜
2)  Zr-N film
Zr-N薄膜
1.
In order to investigate the effect of substrate temperature on diffusion barrier properties of Zr-N films,4-point probe technique(FPP),atomic force microscope(AFM),X-ray diffraction(XRD),and auger electron spectroscopy(AES) were performed respectively.
用四探针电阻测试仪(FPP)、AFM、XRD、AES研究了沉积温度对Zr-N薄膜扩散阻挡性能的影响。
3)  Zr-Cu-N film
Zr-Cu-N薄膜
4)  Zr-Ni-N film
Zr-Ni-N薄膜
5)  Zr-Ti-N thin film
Zr-Ti-N薄膜
6)  (Ti,Zr)N coating
(Ti,Zr)N薄膜
补充资料:2,4-pentanedione, zr deriv.
7501-44-9
分子式: C20H28O8Zr
分子质量: 487.65
熔点:  171-173℃

中文名称: 四(2,4-戊二酮)锆

英文名称: tetrakis(2,4-pentanedionato-O,O')-, (SA-8-11''11''1'1'''1'1''')-Zirconium;tetrakis(2,4-pentanedionato-o,o')-zirconiu ;2,4-pentanedione, zirconium complex;2,4-pentanedione, zr deriv.;nasemu zirconium;orgatix zc 150;tetraacetylacetonate zirconium;tetrakis(acetylacetonato)zirconium
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