1.
PACKAGING OF WAVEGUIDE DEVICES BASED ON BULK SILICON MEMS TECHNOLOGY
基于体硅微机械工艺的光波导器件封装技术
2.
Design and Fabricate Process of a Three-frame MEMS Gyroscope;
三框架硅微机械陀螺的结构设计及加工工艺研究
3.
Study on MEMS Based Planar Micromotor
基于微机械工艺的平面微电机的研究
4.
8 Inch Copper Chemical Mechanical Polish Process vs Wafer Corrosion Defect Reduction Method;
八英寸铜化学机械研磨工艺对硅片腐蚀的改善
5.
Errors Analysis of Silicon Micro-machined Gyroscope Driven by Rotating Carrier
旋转载体驱动的硅微机械陀螺误差研究
6.
Study on Mems Technology Based Electro-Magnetic Planar Micromotor;
基于微机械工艺的电磁型平面微电机的研究
7.
A High Performance Accelerometer with a Newly Developed Silicon Bulk Micromachining Technology;
新型体微机械工艺制造高性能加速度传感器的研究
8.
Study on MEMS Optical Switch Based on Vertical Torsional Micromirror;
转动竖直微镜的硅微机械光开关研究
9.
Studies on process of microarc oxidation for AZ91D magnesium alloy in silicate system
硅酸盐体系中AZ91D镁合金微弧氧化工艺的研究
10.
STUDY ON THE TECHNOLOGICAL CONDITIONS FOR THE PREPARATION OF HIGH RELATIVE DENSITY SILICON CARBIDE CERAMICS:MECHANICAL AGITATION AND HIGH ENERGY MILLING
低温高致密度碳化硅陶瓷制备工艺研究——机械搅拌与高能球磨
11.
NEW MEMS MANUFACTURING TECHNOLOGIES
微电子机械系统的新制造工艺技术(英文)
12.
Technology of Shape Memory Alloy Thin Films for MEMS
用于微机械的形状记忆合金薄膜工艺研究
13.
Design and Process of a Novel RF MEMS Latching Switch;
新型锁存射频微机械开关的设计与工艺研究
14.
The Structural Design and Technological Study of an Electromagnetic Micromachined Gyroscope;
电磁式微机械陀螺结构设计与工艺研究
15.
Some Microelectromechanical Systems and Related LIGA Techniques
若干微电子机械系统研制及相关LIGA工艺研究
16.
Investigation on Procession and Properties of Carbon Microspheres by Ball Milling
机械球磨制备碳微球的工艺及相关性能研究
17.
Design and Fabrication of a Bulk Micromachined Vibratory Tunneling Gyroscope
新型微机械隧道陀螺仪的设计和工艺制备
18.
High-performance MEMS RF Passive Components and Silicon Micromachined Technology;
高性能MEMS射频无源器件与三维硅微机械加工技术